BME 579 - Micro/Nano ElectroMech Sys/Sen

Institution:

The University of Tennessee - Knoxville

Subject:

Biomedical Engineering

Description:

Scaling law, lithography, wet etching, dry etching, physical vapor deposition, chemical vapor deposition, electrochemical deposition, electrostatic/piezoelectric/thermal/tactile sensing and actuationCross listed: (See: Aerospace Engineering 579.)(DE) Prerequisite(s): Undergrad level Engineering Mechanics, Fluid Mechanics, Heat Transfer.

Credits:

3.00

Credit Hours:

Prerequisites:

Corequisites:

Exclusions:

Level:

Instructional Type:

Lecture

Notes:

Additional Information:

Historical Version(s):

Institution Website:

www.tennessee.edu

Phone Number:

(865) 974-1000

Regional Accreditation:

Southern Association of Colleges and Schools

Calendar System:

Semester

The Course Profile information is provided and updated by third parties including the respective institutions. While the institutions are able to update their information at any time, the information is not independently validated, and no party associated with this website can accept responsibility for its accuracy.